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Ultrashort-pulse source with controllable multiple-wavelength ou

Optical: systems and elements – Optical frequency converter – Harmonic generator
Patent

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Ultraviolet laser apparatus and exposure apparatus using same

Optical: systems and elements – Optical frequency converter – Harmonic generator
Reexamination Certificate

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Ultraviolet laser apparatus and exposure apparatus using same

Optical: systems and elements – Optical frequency converter – Harmonic generator
Reexamination Certificate

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