Ultraviolet laser apparatus and exposure apparatus using same

Details Ultraviolet laser apparatus and exposure apparatus using same Ultraviolet laser apparatus and exposure apparatus using same

2007-10-02

2007-10-02

Sanghavi, Hemang (Department: 2874)

Optical: systems and elements

Optical frequency converter

Harmonic generator

C359S326000, C359S341100, C372S005000, C372S022000

Reexamination Certificate

active

11519824

ABSTRACT:
A laser apparatus including a laser generating portion that generates pulse light having a single wavelength within a range from an infrared band to a visible band. An optical amplifier is optically connected to the laser generating portion, and includes a plurality of fiber optical amplifiers to amplify the pulse light a plurality of times. A wavelength converting portion is optically connected to the optical amplifier, and includes cylindrical lenses and a plurality of non-linear optical crystals to wavelength-convert the amplified pulse light into ultraviolet light. The amplified pulse light is incident on the cylindrical lenses through one of the plurality of non-linear optical crystals and is incident on a different one of the plurality of non-linear optical crystals from the one non-linear optical crystal through the cylindrical lenses.

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