Ultraviolet laser apparatus and exposure apparatus using same

Details Ultraviolet laser apparatus and exposure apparatus using same Ultraviolet laser apparatus and exposure apparatus using same

2006-04-04

2006-04-04

Lee, John D. (Department: 2874)

Optical: systems and elements

Optical frequency converter

Harmonic generator

C359S326000, C359S341100, C372S005000, C372S022000

Reexamination Certificate

active

07023610

ABSTRACT:
An ultraviolet laser apparatus having a single-wavelength oscillating laser generating laser light between an infrared band and a visible band, an optical amplifier for amplifying the laser light, and a wavelength converting portion converting the amplified laser light into ultraviolet light using a non-linear optical crystal. An exposure apparatus transfers a pattern image of a mask onto a substrate and includes a light source having a laser apparatus emitting laser light having a single wavelength, a first fiber optical amplifier for amplifying the laser light, a light dividing device for dividing or branching the amplified laser light into plural lights, and second fiber optical amplifiers for amplifying the plural divided or branched lights, respectively, and a transmission optical system for transmitting the laser light emitted from the light source to the exposure apparatus.

REFERENCES:
patent: 5050949 (1991-09-01), DiGiovanni et al.
patent: 5621744 (1997-04-01), Kikuchi et al.
patent: 5745284 (1998-04-01), Goldberg et al.
patent: 5838709 (1998-11-01), Owa
patent: 5909306 (1999-06-01), Goldberg et al.
patent: 6055092 (2000-04-01), Sugaya et al.
patent: 6128030 (2000-10-01), Kikuchi et al.
patent: 6590698 (2003-07-01), Ohtsuki et al.
patent: 6781672 (2004-08-01), Motegi
patent: 2-107034 (1990-04-01), None
patent: 3-102898 (1991-10-01), None
patent: 4-196280 (1992-07-01), None
patent: 4-347945 (1992-12-01), None
patent: 05-003455 (1993-01-01), None
patent: 5-102565 (1993-04-01), None
patent: 5-275793 (1993-10-01), None
patent: 6-077572 (1994-03-01), None
patent: 7-161625 (1995-06-01), None
patent: 9-162104 (1997-06-01), None
patent: 9-265-060 (1997-10-01), None

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