Multi-layer spectral purity filter, lithographic apparatus...
Multi-layered coating for optical part comprising YF.sub.3 layer
Multi-special decentered catadioptric optical system
Multi-wavelength optical microscope
Multi-wavelength variable attenuator and half wave plate
Multi-wavelength variable attenuator and half wave plate
Multilayer anti-reflection coating using zinc oxide to provide u
Multilayer anti-reflective and ultraviolet blocking coating for
Multilayer antireflection film, optical member, and...
Multilayer extreme ultraviolet mirrors with enhanced...
Multilayer extreme ultraviolet mirrors with enhanced...
Multilayer film reflector for soft X-rays and manufacturing...
Multilayer film reflector for soft X-rays and manufacturing...
Multilayer infrared filter
Multilayer infrared reflecting film with high and smooth...
Multilayer infrared reflecting film with high and smooth...
Multilayer infrared reflecting optical body
Multilayer mirror, method for manufacturing the same, and...
Multilayer optical filter for producing colored reflected light
Multilayer-film mirrors, lithography systems comprising...