Multilayer film reflector for soft X-rays and manufacturing...

Details Multilayer film reflector for soft X-rays and manufacturing... Multilayer film reflector for soft X-rays and manufacturing...

2008-03-11

2008-03-11

Allen, Stephone B. (Department: 2872)

Optical: systems and elements

Having significant infrared or ultraviolet property

Multilayer filter or multilayer reflector

C359S360000

Reexamination Certificate

active

11087679

ABSTRACT:
A multilayer film reflector for X-rays has alternately stacked layers formed on a substrate and comprising a layer (high refractive index layer) comprising a material having a large difference between a refractive index to soft X-ray and a refractive index in vacuum, and a layer (low refractive index layer) comprising a material having a small difference between a refractive index to soft X-ray and a refractive index in vacuum, wherein at least one intermediate layer having a crystalline structure is provided between the low refractive index layer and the high refractive index layer. Thereby, the crystallization of the low refractive index layer is promoted, the refractive index of the low refractive index layer is lowered, so that the reflectance of the multilayer film reflector is improved.

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