Projection exposure apparatus
Projection exposure apparatus and device manufacturing method
Projection exposure systems
Projection method and projection system and mask therefor
Projection method and projection system and mask therefor
Projection method and projection system and mask therefor
Projection method and projection system and mask therefor
Projection optical system and projection exposure apparatus usin
Projection type image display apparatus
Pseudo deconvolution method of recovering a distorted...
Pseudo-spherical stepped diffractor constructed under...
Quasi volume diffracting structures
Re-imaging optical system employing refractive and diffractive o
Real time optical correlation system
Reconfigurable compound diffraction grating
Reconfigurable zone plate lens
Reconfigurable zone plate lens
Reduced loss diffractive structure
Reflecting diffraction grating and device, such as encoder or th
Reflection type diffraction grating