4. Measuring and testing
  5. Instrument proving or calibrating
  6. Displacement, motion, distance, or position
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Wafer alignment jig for wafer-handling systems

Measuring and testing – Instrument proving or calibrating – Displacement – motion – distance – or position
Reexamination Certificate

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Wafer center alignment device and method of wafer alignment

Measuring and testing – Instrument proving or calibrating – Displacement – motion – distance – or position
Reexamination Certificate

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Wafer centering device and method of using

Measuring and testing – Instrument proving or calibrating – Displacement – motion – distance – or position
Patent

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