4. Measuring and testing
  5. Instrument proving or calibrating
  6. Displacement, motion, distance, or position
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Lateral calibration device and method

Measuring and testing – Instrument proving or calibrating – Displacement – motion – distance – or position
Reexamination Certificate

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Lithographic apparatus, method of calibration, calibration...

Measuring and testing – Instrument proving or calibrating – Displacement – motion – distance – or position
Reexamination Certificate

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