4. Material or article handling
  5. Associated with semiconductor wafer handling
  6. Including means for charging or discharging wafer cassette
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Load lock chamber for large area substrate processing system

Material or article handling – Associated with semiconductor wafer handling – Including means for charging or discharging wafer cassette
Reexamination Certificate

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Removable semiconductor wafer susceptor

Material or article handling – Associated with semiconductor wafer handling – Including means for charging or discharging wafer cassette
Reexamination Certificate

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Transport apparatus and method

Material or article handling – Associated with semiconductor wafer handling – Including means for charging or discharging wafer cassette
Reexamination Certificate

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