4. Material or article handling
  5. Associated with semiconductor wafer handling
  6. Includes means for gripping wafer
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Flexibly mounted contact cup

Material or article handling – Associated with semiconductor wafer handling – Includes means for gripping wafer
Reexamination Certificate

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Method for transferring wafers in a semiconductor...

Material or article handling – Associated with semiconductor wafer handling – Includes means for gripping wafer
Reexamination Certificate

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Semiconductor-manufacturing device having buffer mechanism...

Material or article handling – Associated with semiconductor wafer handling – Includes means for gripping wafer
Reexamination Certificate

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