4. Heating
  5. Work chamber having heating means
  6. Crucible or pot heating furnace
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Carbon, hydrogen, and nitrogen analyzer

Heating – Work chamber having heating means – Crucible or pot heating furnace
Patent

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Carbon, hydrogen, and nitrogen analyzer

Heating – Work chamber having heating means – Crucible or pot heating furnace
Patent

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Combustion device

Heating – Work chamber having heating means – Crucible or pot heating furnace
Patent

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Conforming crucible/susceptor system for silicon crystal growth

Heating – Work chamber having heating means – Crucible or pot heating furnace
Patent

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