Conforming crucible/susceptor system for silicon crystal growth

Details Conforming crucible/susceptor system for silicon crystal growth Conforming crucible/susceptor system for silicon crystal growth

1987-02-09

1988-05-31

Yuen, Henry C.

Heating

Work chamber having heating means

Crucible or pot heating furnace

432157, 432264, 432265, F27B 1400

Patent

active

047477741

ABSTRACT:
A crucible/susceptor system is described in which the walls of the crucible and the susceptor cavity are sloped outward in an angle sufficient for the force of gravity to exceed the inward pulling forces created by the high surface tension of molten silicon allowing the softened quartz crucible walls to settle into and form to the sloped walls of the susceptor thereby improving heat transfer from the susceptor to the molten silicon and improving the reproducibility of the system.

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K. Keller, J. Konrad, W. Renkel, IBM Technical Disclosure Bulletin, vol. 19, No. 7, (Dec. 1976) p. 2590.

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