Heating – Work chamber having heating means – Crucible or pot heating furnace
Patent
1993-04-26
1995-08-29
Kamen, Noah P.
Heating
Work chamber having heating means
Crucible or pot heating furnace
431346, 432241, 432 5, 432 6, F27B 1400
Patent
active
054455227
ABSTRACT:
This invention relates to a combustion device for feeding hydrogen gas and oxygen gas into a combustion vessel, while heating the same, to generate water vapor. The combustion device comprises a hydrogen gas injection nozzle for feeding hydrogen gas into the combustion vessel, and an oxygen gas injection nozzles for feeding oxygen gas into the combustion vessel. The oxygen nozzles are projected further upward in the combustion vessel beyond the forward end of the hydrogen gas injection nozzle, and opened at a plurality of positions, whereby to diffuse oxygen widely around. The combustion device of this structure can feed a large amount of hydrogen gas for the combustion, whereby a large amount of water vapor can be generated without enlarging the combustion vessel, and troubles, such as the devitrification of the forward ends of the nozzles, abnormal heating in the combustion vessel.
REFERENCES:
patent: 5245934 (1993-09-01), Dodson
patent: 5271732 (1993-12-01), Yokokawa
patent: 5273424 (1993-12-01), Kobayashi
patent: 5277579 (1994-01-01), Takanche
patent: 5314847 (1994-05-01), Watanabe et al.
Akimoto Kazuo
Mitsuhashi Hiroyuki
Miyagi Katsushin
Kamen Noah P.
Tokyo Electron Kabushiki Kaisha
Tokyo Electron Tohoku Kabushiki Kaisha
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