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Cooling system for reducing particles pollution

Heating – With work cooling structure – Work holder having selectively usable heating and cooling...
Reexamination Certificate

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Gas-cooled single chamber heat treating furnace, and method...

Heating – With work cooling structure – Work holder having selectively usable heating and cooling...
Reexamination Certificate

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Heat treatment device

Heating – With work cooling structure – Work holder having selectively usable heating and cooling...
Reexamination Certificate

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Method and apparatus for improved substrate handling

Heating – With work cooling structure – Work holder having selectively usable heating and cooling...
Reexamination Certificate

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Semiconductor thermal processor with recirculating heater exhaus

Heating – With work cooling structure – Work holder having selectively usable heating and cooling...
Patent

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Vestibule assembly for a heat treatment furnace

Heating – With work cooling structure – Work holder having selectively usable heating and cooling...
Reexamination Certificate

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Water cooled scrap preheating bucket

Heating – With work cooling structure – Work holder having selectively usable heating and cooling...
Patent

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