Heat treatment device

Details Heat treatment device Heat treatment device

2011-01-18

2011-01-18

Wilson, Gregory A (Department: 3749)

Heating

With work cooling structure

Work holder having selectively usable heating and cooling...

C432S249000, C219S443100

Reexamination Certificate

active

07871265

ABSTRACT:
In a heat treatment device including a heating chamber having a heating plate heating a semiconductor wafer, a cooling plate cooling the wafer heated by the heating chamber, and a transporting device transporting the wafer into and from the heating chamber, the cooling plate is provided with a coolant passage, a plurality of projections carrying the wafer with a space between the wafer and the surface of the cooling plate, and suction holes neighboring to the respective projections and connected to a suction device.

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patent: 2006-210400 (2006-08-01), None

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