4. Heating
  5. Processes of heating or heater operation
  6. Including preparing or arranging work for heating
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Wafer boat and method for treatment of substrates

Heating – Processes of heating or heater operation – Including preparing or arranging work for heating
Reexamination Certificate

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Wafer heating device and method of controlling the same

Heating – Processes of heating or heater operation – Including preparing or arranging work for heating
Reexamination Certificate

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Wafers transferring method in vertical type heat treatment appar

Heating – Processes of heating or heater operation – Including preparing or arranging work for heating
Patent

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Workpiece support

Heating – Processes of heating or heater operation – Including preparing or arranging work for heating
Patent

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