Wafers transferring method in vertical type heat treatment appar

Details Wafers transferring method in vertical type heat treatment appar Wafers transferring method in vertical type heat treatment appar

1992-03-06

1994-01-11

Yuen, Henry C.

Heating

Processes of heating or heater operation

Including preparing or arranging work for heating

432 6, 432241, F27D 312

Patent

active

052775798

ABSTRACT:
A wafers transferring method in the heat treatment apparatus of the vertical type comprising providing a boat loading/unloading chamber under a process tube, providing an elevator in the boat loading/unloading chamber, providing a wafer loading/unloading chamber communicated with the boat loading/unloading chamber, providing a robot in the wafer loading/unloading chamber, mounting a boat on the elevator, loading wafers one by one into the boat from the bottom to the top by the robot, while lowering the boat every pitch, heat-processing the wafers in the boat in the process tube, and unloading the wafers one by one from the boat from the top to the bottom by the robot, while lifting the boat every pitch.

REFERENCES:
patent: 4610628 (1986-09-01), Mizushima
patent: 4828490 (1989-05-01), Indig
patent: 4981436 (1991-01-01), Watanabe
patent: 5055036 (1991-10-01), Asano et al.
patent: 5131842 (1992-07-01), Miyazaki et al.

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