4. Etching a substrate: processes
  5. Nongaseous phase etching of substrate
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Fabrication method to produce pit-free polysilicon buffer local

Etching a substrate: processes – Nongaseous phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...
Patent

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Film dissolution method of dissolving silica-based coating film

Etching a substrate: processes – Nongaseous phase etching of substrate – Projecting etchant against a moving substrate or controlling...
Patent

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Fine-dimension masks and related processes

Etching a substrate: processes – Nongaseous phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Finishing with partial organic boundary layer

Etching a substrate: processes – Nongaseous phase etching of substrate – Using film of etchant between a stationary surface and a...
Reexamination Certificate

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