4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Etching vapor produced by evaporation, boiling, or sublimation
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HF vapor phase wafer cleaning and oxide etching

Etching a substrate: processes – Gas phase etching of substrate – Etching vapor produced by evaporation – boiling – or sublimation
Reexamination Certificate

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Method and apparatus for etch of a specific subarea of a...

Etching a substrate: processes – Gas phase etching of substrate – Etching vapor produced by evaporation – boiling – or sublimation
Reexamination Certificate

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Vapor selective etching method and apparatus

Etching a substrate: processes – Gas phase etching of substrate – Etching vapor produced by evaporation – boiling – or sublimation
Patent

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