4. Electricity: motive power systems
  5. Positional servo systems
  6. With particular 'error-detecting' means
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Wafer stage with reference surface

Electricity: motive power systems – Positional servo systems – With particular 'error-detecting' means
Patent

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Waveform generator for a resolver

Electricity: motive power systems – Positional servo systems – With particular 'error-detecting' means
Patent

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Wide band angular displacement and velocity sensor and method

Electricity: motive power systems – Positional servo systems – With particular 'error-detecting' means
Patent

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Wire bonding unit using infra-red ray detector

Electricity: motive power systems – Positional servo systems – With particular 'error-detecting' means
Patent

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