Polyphase linear motor
Portable linear actuator and a method of limiting the...
Position measurement using magnetic fields
Positioning table and linear motor
Power supply apparatus for linear motor
Power supply system and method for linear stator motor
Power supply system for a linear motor
Power supply system for a linear motor
Power supply system for a long-stator drive for a magnetic levit
Power supply system for linear motor
Resonance reducing arrangements
Sawyer motor forcer with integrated drive electronics
Section switching process for railway systems with a long stator
Self-starting synchronous motor
Single element magnetic suspension actuator
Sinusoidal feed-forward seek with adaptive acoustic level...
Sliding mode control system
Stage apparatus and linear motor, and exposure apparatus and dev
Stage system and exposure apparatus
Stage unit, exposure apparatus, and device manufacturing method