Stage unit, exposure apparatus, and device manufacturing method

Details Stage unit, exposure apparatus, and device manufacturing method Stage unit, exposure apparatus, and device manufacturing method

2011-07-19

2011-07-19

Mullins, Burton (Department: 2834)

Electricity: motive power systems

Linear-movement motors

C310S012060, C310S012210, C355S053000

Reexamination Certificate

active

07982417

ABSTRACT:
A stage unit includes the following elements. A stator includes a first coil array in which first coils extending in the x direction are arranged in the y direction, a second coil array in which second coils extending in the x direction are arranged in the y direction and which is located next to the first coil array in the x direction, and a third coil array in which third coils extending in the y direction are arranged in the x direction and which covers the first and second coil arrays. A movable member moves above the stator. A controller controls driving of the movable member by allowing current amplifiers to supply current to the coils included in the first, second, and third coil arrays. A switch is capable of connecting the first coil to the second coil.

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