Stage apparatus and linear motor, and exposure apparatus and dev

Details Stage apparatus and linear motor, and exposure apparatus and dev Stage apparatus and linear motor, and exposure apparatus and dev

1996-10-03

1998-11-24

LaBalle, Clayton E.

Electricity: motive power systems

Linear-movement motors

310 12, H02K 4100, H02K 4102

Patent

active

058412506

ABSTRACT:
It is an object to provide a compact, lightweight, and inexpensive stage apparatus. A stage apparatus for moving a stage in a predetermined direction includes a stage accelerating/decelerating thrust generation unit arranged along the moving direction, a stage speed control thrust generation unit arranged to be parallel to the stage accelerating/decelerating thrust generation unit, an accelerating unit for generating a stage accelerating thrust at a portion corresponding to the stage accelerating interval of the accelerating/decelerating thrust generation unit, a decelerating unit for generating a stage decelerating thrust at a portion corresponding to the stage decelerating interval of the accelerating/decelerating thrust generation unit, and a speed control unit for controlling the stage thrust generated by the speed control thrust generation unit at least within a predetermined range between the accelerating interval and the decelerating interval.

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