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Technique and apparatus for testing electrostatic chucks

Electricity: measuring and testing – Electrostatic field
Patent

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Time averaged amplitude comparison electrometer

Electricity: measuring and testing – Electrostatic field
Patent

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Tools for measuring electrometer dispenser response

Electricity: measuring and testing – Electrostatic field
Reexamination Certificate

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Transmission line pulse method for measuring electrostatic...

Electricity: measuring and testing – Electrostatic field
Reexamination Certificate

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