Linear motor with magnetic bearing preload

Linear motor with negative pressure cooling circuit

Linear motor with permanent magnets

Linear motor with reduced cogging

Linear motor with reduced cogging

Linear motor with reduced cogging force

Linear motor with ring magnet and non-magnetizable end caps

Linear motor with seal

Linear motor within a positioning device

Linear motor, and linear compressor using the same

Linear motor, and secondary for a linear motor

Linear motor, and stage apparatus and exposure apparatus using t

Linear motor, and stage device and exposure apparatus provided w

Linear motor, driving and control system thereof and...

Linear motor, exposure apparatus using the same, and device...

Linear motor, exposure apparatus using the same, and device...

Linear motor, its controlling method, and XY table

Linear motor, method for controlling the same, and linear...

Linear motor, moving stage system, exposure apparatus, and...

Linear motor, moving stage system, exposure apparatus, and...