Sliding means with built-in moving-magnet linear motor
Sliding system with onboard moving-coil linear motor
Small diameter brushless direct current linear motor and method
Small footprint vertical lift and rotation stage
Small linear motor table
Small-size direct-acting actuator
Small-size direct-acting actuator
Small-sized plunger
Solenoid actuator with positional feedback
Solenoid operated remote resetting device with a protective acti
Solenoid plunger system with an adjustable magnetic flux
Solid state commutated linear motor with an ironless multiphase
Specially oriented material and magnetization of permanent magne
Spiral linear motor
Split coil linear motor for z force
Stage apparatus
Stage apparatus
Stage apparatus and inspection apparatus having stage apparatus
Stage apparatus and linear motor, and exposure apparatus and dev
Stage apparatus and method of controlling the same