4. Electric lamp and discharge devices
  5. With positive or negative ion acceleration
  6. Means for deflecting or focusing
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Immersion gun equipped electron beam column

Electric lamp and discharge devices – With positive or negative ion acceleration – Means for deflecting or focusing
Reexamination Certificate

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Ion beam species filter and blanker

Electric lamp and discharge devices – With positive or negative ion acceleration – Means for deflecting or focusing
Patent

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Ion implantation apparatus utilizing multiple aperture source pl

Electric lamp and discharge devices – With positive or negative ion acceleration – Means for deflecting or focusing
Patent

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