Immersion gun equipped electron beam column

Details Immersion gun equipped electron beam column Immersion gun equipped electron beam column

2008-09-05

2010-10-26

Santiago, Mariceli (Department: 2879)

Electric lamp and discharge devices

With positive or negative ion acceleration

Means for deflecting or focusing

C313S425000, C250S492100, C250S310000

Reexamination Certificate

active

07821187

ABSTRACT:
An electron gun of the type having an electron emitter for emitting electrons, including an electrostatic lens and a magnetic lens formed by pole pieces with a winding coil disposed between the magnetic pole pieces. The magnetic lens forms a rotationally symmetrical magnetic field in a gap formed by the pole pieces. The magnetic field forms the magnetic lens and focuses the electrons emitted from the emitter. A vacuum tube separates the electron gun from the magnetic lens. The electron gun is sealed in a vacuum by the vacuum tube and the magnetic lens is shielded in air.

REFERENCES:
patent: 6392333 (2002-05-01), Veneklasen et al.
patent: 2006/0231773 (2006-10-01), Katagiri et al.

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