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RF plasma source and antenna therefor

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Patent

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RF plasma source and method for plasma cleaning of surface in sp

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Patent

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RF plasma source for material processing

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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RF plasma source with quasi-closed solenoidal inductor

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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RF power control device for RF plasma applications

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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RF power control device for RF plasma applications

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reissue Patent

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RF tuning method for an RF plasma reactor using frequency...

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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RF-powered plasma accelerator/homogenizer

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
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