4. Drying and gas or vapor contact with solids
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Vacuum processing apparatus and operating method therefor

Drying and gas or vapor contact with solids – Process – Gas or vapor pressure is subatmospheric
Reexamination Certificate

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Vacuum processing apparatus and operating method therefor

Drying and gas or vapor contact with solids – Process – With sealing of treating chamber
Reexamination Certificate

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Vacuum processing apparatus and operating method with...

Drying and gas or vapor contact with solids – Process – With sealing of treating chamber
Reissue Patent

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Vacuum processing apparatus and operating method with...

Drying and gas or vapor contact with solids – Process – Gas or vapor pressure is subatmospheric
Reissue Patent

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Vacuum processing apparatus and semiconductor manufacturing...

Drying and gas or vapor contact with solids – Apparatus – Vacuum
Reexamination Certificate

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Vacuum processing apparatus and substrate transfer method

Drying and gas or vapor contact with solids – Apparatus – Vacuum
Reexamination Certificate

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Vacuum processing apparatus and vacuum processing method

Drying and gas or vapor contact with solids – Process – With nondrying treating of material
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Vacuum processing apparatus for substate wafers

Drying and gas or vapor contact with solids – Apparatus – Vacuum
Patent

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Vacuum processing method and apparatus

Drying and gas or vapor contact with solids – Process – Gas or vapor pressure varies during treatment
Reexamination Certificate

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Vacuum processing operating method with wafers, substrates...

Drying and gas or vapor contact with solids – Process – Gas or vapor pressure is subatmospheric
Reissue Patent

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Vacuum processing operating method with wafers, substrates...

Drying and gas or vapor contact with solids – Process – Gas or vapor pressure is subatmospheric
Reissue Patent

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Vacuum processing operating method with wafers, substrates...

Drying and gas or vapor contact with solids – Process – Gas or vapor pressure is subatmospheric
Reissue Patent

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Vacuum pump with heated vapor pre-trap

Drying and gas or vapor contact with solids – Apparatus – With means to treat gas or vapor
Patent

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Vacuum pump with heated vapor pre-trap

Drying and gas or vapor contact with solids – Apparatus – With means to treat gas or vapor
Patent

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Vacuum remediation system

Drying and gas or vapor contact with solids – Apparatus – Vacuum
Patent

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Vacuum roll apparatus

Drying and gas or vapor contact with solids – Apparatus – Rotary drums or receptacles
Patent

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Vacuum roll apparatus

Drying and gas or vapor contact with solids – Apparatus – Rotary drums or receptacles
Patent

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Vacuum roll transfer apparatus

Drying and gas or vapor contact with solids – Apparatus – Rotary drums or receptacles
Patent

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Vacuum roll transfer apparatus

Drying and gas or vapor contact with solids – Apparatus – With means to treat gas or vapor
Patent

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Vacuum roll transfer apparatus

Drying and gas or vapor contact with solids – Apparatus – Rotary drums or receptacles
Patent

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