Drying and gas or vapor contact with solids – Apparatus – Vacuum
Reexamination Certificate
2005-05-24
2005-05-24
Esquivel, Denise L. (Department: 3749)
Drying and gas or vapor contact with solids
Apparatus
Vacuum
C034S060000, C134S085000, C134S902000, C118S730000, C118S719000, C414S939000, C414S940000
Reexamination Certificate
active
06895685
ABSTRACT:
A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing vacuum processing to the sample and a vacuum transfer means for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.
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IBM Technical Disclosure Bulletin, vol. 27, No. 12, May 31, 1985, pp. 6997-6998 XP002017023 “Generic work Station”.
Kawasaki Yoshinao
Soraoka Minoru
Yoshioka Ken
Esquivel Denise L.
Hitachi , Ltd.
O'Malley Kathryn S.
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