4. Drying and gas or vapor contact with solids
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Rotary silicon wafer cleaning apparatus

Drying and gas or vapor contact with solids – Process – By centrifugal force
Reexamination Certificate

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Rotary-type wafer drying apparatus with anti-deflection cover

Drying and gas or vapor contact with solids – Process – By centrifugal force
Patent

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Rotatable air knife

Drying and gas or vapor contact with solids – Process – Gas or vapor contact with treated material
Reexamination Certificate

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