4. Coating apparatus
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Oxidation metod

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Oxide superconducting film manufacturing apparatus

Coating apparatus – Control means responsive to a randomly occurring sensed... – Responsive to condition of coating material
Patent

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Oxide superconducting film manufacturing apparatus

Coating apparatus – Control means responsive to a randomly occurring sensed... – Responsive to condition of coating material
Patent

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Oxidizing method and oxidizing unit for object to be processed

Coating apparatus – Program – cyclic – or time control
Reexamination Certificate

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Oxidizing method and oxidizing unit of object for object to...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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