Oxidizing method and oxidizing unit for object to be processed

Details Oxidizing method and oxidizing unit for object to be processed Oxidizing method and oxidizing unit for object to be processed

2011-04-19

2011-04-19

Lund, Jeffrie R (Department: 1716)

Coating apparatus

Program, cyclic, or time control

C118S715000, C118S724000, C118S725000, C118S684000

Reexamination Certificate

active

07926445

ABSTRACT:
An oxidizing method for an object to be processed according to the present invention includes: an arranging step of arranging a plurality of objects to be processed in a processing container whose inside can be vacuumed, the processing container having a predetermined length, a main supplying unit of an oxidative gas and a supplying unit of a reducing gas being provided at one end of the processing container, a sub supplying unit of the oxidative gas being provided on a way in a longitudinal direction of the processing container; an atmosphere forming step of supplying the oxidative gas and the reducing gas into the processing container in order to form an atmosphere having active oxygen species and active hydroxyl species in the processing container; and an oxidizing step of oxidizing surfaces of the plurality of objects to be processed in the atmosphere. In the atmosphere forming step, the oxidative gas is adapted to be supplied from the main supplying unit of the oxidative gas and the sub supplying unit of the oxidative gas.

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Korean Office Action issued on Jul. 21, 2009 for Korean Patent Application No. 10-2005-23875 with English translation.

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