4. Cleaning and liquid contact with solids
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Substrate processing apparatus and substrate processing method

Cleaning and liquid contact with solids – Processes – Including forming a solidified or hardened coating for cleaning
Reexamination Certificate

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Substrate processing apparatus, liquid film freezing method...

Cleaning and liquid contact with solids – Processes – Including forming a solidified or hardened coating for cleaning
Reexamination Certificate

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Substrate processing method and substrate processing apparatus

Cleaning and liquid contact with solids – Processes – Including forming a solidified or hardened coating for cleaning
Reexamination Certificate

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Surface cleaning process

Cleaning and liquid contact with solids – Processes – Including forming a solidified or hardened coating for cleaning
Patent

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System for removing fluid and debris from pipelines

Cleaning and liquid contact with solids – Processes – Including forming a solidified or hardened coating for cleaning
Patent

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