4. Cleaning and liquid contact with solids
  5. Processes
  6. Including application of electrical radiant or wave energy...
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CVD apparatus

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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CVD apparatus with high throughput and cleaning method therefor

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Patent

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CVD chamber cleaning using mixed PFCs from capture/recycle

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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