4. Chucks or sockets
  5. Jaws mounted on flexible member; i.e., diaphragm
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Chuck assembly

Chucks or sockets – Jaws mounted on flexible member; i.e. – diaphragm
Patent

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Diaphragm chuck

Chucks or sockets – Jaws mounted on flexible member; i.e. – diaphragm
Reexamination Certificate

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Diaphragm chuck

Chucks or sockets – Jaws mounted on flexible member; i.e. – diaphragm
Reexamination Certificate

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Diaphragm chuck

Chucks or sockets – Jaws mounted on flexible member; i.e. – diaphragm
Patent

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Semiconductor processor wafer holder

Chucks or sockets – Jaws mounted on flexible member; i.e. – diaphragm
Patent

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