Semiconductor processor wafer holder

Details Semiconductor processor wafer holder Semiconductor processor wafer holder

1992-03-18

1995-07-11

Bishop, Steven C.

Chucks or sockets

Jaws mounted on flexible member; i.e., diaphragm

118503, 118730, 20429815, 134149, B23B 3132, F23M 910

Patent

active

054314216

ABSTRACT:
A wafer processor including a wafer support for holding semiconductor wafers. The wafer support member includes wafer gripping fingers mounted in receptacles formed through a wafer support plate. The fingers are angularly displaced to spread the fingers and allow loading of wafers therebetween. The fingers have central cores which are flexibly mounted within a mounting flange by a thin diaphragm. A pivot control supports the cores and carries axial loading. The pivot control members preferably are U-shaped and can serve as connections to an actuator. A locking mechanism is also shown to secure the actuator connection.

REFERENCES:
patent: 3585668 (1971-06-01), Jaccodine et al.
patent: 4313266 (1982-02-01), Tam
patent: 4651440 (1987-03-01), Karl
patent: 4687542 (1987-08-01), Davis et al.
patent: 4745422 (1988-05-01), Matsuoka et al.
patent: 4788994 (1988-12-01), Shinbara

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