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PVD sputter system having nonplanar target configuration and met

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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PVD sputter system having nonplanar target configuration and met

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Pyroelectrochemical process for reprocessing irradiated nuclear

Chemistry: electrical and wave energy – Processes and products
Patent

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