Hybrid RF capacitively and inductively coupled plasma source...

Inductive antenna for a plasma reactor producing reduced...

Inductive plasma reactor

Inductively coupled antenna and plasma processing apparatus...

Inductively coupled dual zone processing chamber with single...

Inductively coupled plasma etching apparatus

Inductively coupled plasma generation system with a parallel...

Inductively coupled plasma processing apparatus for very...

Inductively coupled plasma processing apparatus having...

Inductively coupled plasma processing apparatus having...

Inductively coupled RF plasma reactor and plasma chamber...

Inductively-coupled plasma processing system

Internal electrode type plasma processing apparatus and...

Magnetic confinement in a plasma reactor having an RF bias...

Magnetically enhanced inductively coupled plasma reactor...

Magnetically enhanced inductively coupled plasma reactor...

Magnetically enhanced, inductively coupled plasma source for...

Method and apparatus for generating high-density uniform plasma

Method and apparatus for plasma forming inner magnetic...

Method and apparatus for plasma processing