4. Active solid-state devices (e.g., transistors, solid-state diode
  5. Polysilicon containing oxygen, nitrogen, or carbon
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Method of eliminating photoresist poisoning in damascene...

Active solid-state devices (e.g. – transistors – solid-state diode – Polysilicon containing oxygen – nitrogen – or carbon
Reexamination Certificate

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Semiconductor device and method of manufacturing the same

Active solid-state devices (e.g. – transistors – solid-state diode – Polysilicon containing oxygen – nitrogen – or carbon
Reexamination Certificate

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