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Method and apparatus for measuring substrate layer thickness...

Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate

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Method and apparatus for monitoring a metal layer during...

Abrading – Precision device or process - or with condition responsive... – With indicating
Reexamination Certificate

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Method and apparatus for monitoring a polishing condition of...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Method and apparatus for monitoring and controlling the flatness

Abrading – Precision device or process - or with condition responsive... – With feeding of tool or work holder
Patent

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Method and apparatus for monitoring polishing pad wear...

Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate

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Method and apparatus for monitoring polishing plate condition

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Method and apparatus for monitoring polishing state,...

Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate

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Method and apparatus for optical monitoring in chemical...

Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate

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Method and apparatus for optical monitoring in chemical...

Abrading – Precision device or process - or with condition responsive... – With indicating
Reexamination Certificate

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Method and apparatus for optical polishing

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Method and apparatus for performing work operations on a surface

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Patent

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Method and apparatus for pivot point determination and...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Method and apparatus for polishing

Abrading – Precision device or process - or with condition responsive... – Controlling temperature
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Method and apparatus for polishing

Abrading – Precision device or process - or with condition responsive... – By optical sensor
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Method and apparatus for polishing

Abrading – Precision device or process - or with condition responsive... – With feeding of tool or work holder
Reexamination Certificate

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Method and apparatus for polishing

Abrading – Precision device or process - or with condition responsive... – With indicating
Patent

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Method and apparatus for polishing a semiconductor substrate...

Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate

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Method and apparatus for polishing a workpiece surface

Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate

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Method and apparatus for polishing an outer edge ring on a...

Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate

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Method and apparatus for polishing and planarization

Abrading – Precision device or process - or with condition responsive... – With feeding of tool or work holder
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