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Ultrasonic methods and apparatus for the in-situ detection...

Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate

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Ultrasonic welding method for the manufacture of a polishing...

Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate

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Use of scatterometry/reflectometry to measure thin film...

Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate

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