Ultrasonic welding method for the manufacture of a polishing...

Details Ultrasonic welding method for the manufacture of a polishing... Ultrasonic welding method for the manufacture of a polishing...

2006-02-14

2006-02-14

Rachuba, M. (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

By optical sensor

C451S056000, C451S548000

Reexamination Certificate

active

06997777

ABSTRACT:
A method of forming a chemical-mechanical polishing pad having at least one optically transmissive region comprising (i) providing a polishing pad comprising an aperture, (ii) inserting an optically transmissive window into the aperture of the polishing pad, and (iii) bonding the optically transmissive window to the polishing pad by ultrasonic welding.

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“Ultrasonic Plastics Welding Basics”, Jan. 2001, Welding Journal.

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