4. Synthetic resins or natural rubbers -- part of the class 520 ser
  5. Synthetic resins
  6. From carboxylic acid or derivative thereof

Jae Chang Jung

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Additive for photoresist composition for resist flow process

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate

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Additive for photoresist composition for resist flow process

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Reexamination Certificate

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Additives for improving post exposure delay stability of...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate

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Amide- or imide-introduced copolymer, preparation thereof...

Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Polymers from only ethylenic monomers or processes of...
Reexamination Certificate

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ArF photoresist copolymers

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
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