4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Randhir P. Singh Thakur

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Methods for forming silicon comprising films using...

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Reexamination Certificate

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Silicon nitride film with stress control

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3218370

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