4. Abrading
  5. Abrading process
  6. Glass or stone abrading

Tong-Hua Kuan

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CoSix process to improve junction leakage

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method for improvement of tungsten chemical-mechanical...

Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate

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Obtaining the better defect performance of the fuse CMP...

Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate

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Planarization of shallow trench isolation (STI)

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Reexamination Certificate

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Re-deposition high compressive stress PECVD oxide film after...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2023553

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