4. Coating apparatus
  5. Gas or vapor deposition
  6. Multizone chamber

Yoshiaki Hisamune

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Apparatus for producing semiconductor device

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Method of manufacturing semiconductor device, nonvolatile...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Method of manufacturing semiconductor device, nonvolatile...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Nonvolatile memory having contactless array structure which...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1505427

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