4. Coating apparatus
  5. Gas or vapor deposition
  6. Crucible or evaporator structure

Junji Tanimura

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Method of manufacturing semiconductor device

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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Semiconductor device having an improved wiring or electrode...

Active solid-state devices (e.g. – transistors – solid-state diode – Bipolar transistor structure – Plural non-isolated transistor structures in same structure
Reexamination Certificate

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Thin film forming apparatus using laser

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent

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Profile ID: LFUS-PAI-P-1338964

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