Surface analyzing and processing apparatus

Details Surface analyzing and processing apparatus Surface analyzing and processing apparatus

1994-01-24

1995-08-08

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

250306, 2504922, H01J 3700, H01J 3730

Patent

active

054401224

ABSTRACT:
A surface analyzing and processing apparatus analyzes the surface of a sample by detecting secondary electrons, secondary ions, and the like coming out from the surface of the sample while exciting the surface of the sample by means of a probe of an atomic force microscope (AFM) and minutely etches the surface of the sample or deposits a thin film thereon after observing the sample with a high resolving power in the nanometer range by means of the AFM.

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patent: 4618767 (1986-10-01), Smith et al.
patent: 4747698 (1988-05-01), Wickramasinghe
patent: 4823004 (1989-04-01), Kaiser et al.
patent: 5047637 (1991-09-01), Toda
patent: 5047649 (1991-09-01), Hodgson et al.
patent: 5099117 (1992-03-01), Frohn et al.
patent: 5278406 (1994-01-01), Kinoshita et al.

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